Schicht

Material

x

y Belastung  Toleranz

pl

Dicke

Art

Niveau

\u0026 emsp;

\u0026 emsp;

\u0026 emsp;

\u0026 emsp;

(ppm)

(nm)

(Äh)

\u0026 emsp;

(cm-3)

8

Gaas

\u0026 emsp;

\u0026 emsp;

\u0026 emsp;

\u0026 emsp;

0.1

p

\u0026 gt; 2.00e19

7

Gewinn (x) p

0.49

\u0026 emsp;

+/- 500

\u0026 emsp;

0,05

p

\u0026 emsp;

6

[al (x) ga] in (y) p

0.3

0.49

+/- 500r

\u0026 emsp;

1

p

\u0026 emsp;

5

Gewinn (x) p

0.49

\u0026 emsp;

+/- 500

\u0026 emsp;

0.5

u / d

\u0026 emsp;

4

gaas (x) p

0.86

\u0026 emsp;

+/- 500

798

0,013

u / d

\u0026 emsp;

3

Gewinn (x) p

0.49

\u0026 emsp;

+/- 500

\u0026 emsp;

0.5

u / d

\u0026 emsp;

2

[al (x) ga] in (y) p

0.3

0.49

+/- 500

\u0026 emsp;

1

n

\u0026 emsp;

1

Gaas

\u0026 emsp;

\u0026 emsp;

\u0026 emsp;

\u0026 emsp;

0.5

n

\u0026 emsp;

Gaas-Substrat

\u0026 emsp;

\u0026 emsp;

\u0026 emsp;

\u0026 emsp;

\u0026 emsp;

n

\u0026 emsp;